1

Fatigue of polycrystalline silicon under long-term cyclic loading

Year:
2003
Language:
english
File:
PDF, 412 KB
english, 2003
8

Wafer-bonding workshop for MEMS technologies (WBW-MEMS), 11–12 October 2004, Halle

Year:
2006
Language:
english
File:
PDF, 110 KB
english, 2006